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Glossary term

Magneto-Rheological Finishing (MRF)

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Glossary term

Magnification

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Glossary term

Marginal Ray

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Glossary term

Meniscus Lens

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Glossary term

Magnesium Fluoride (MgF<sub>2</sub>)

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Glossary term

Microlithography

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Glossary term

Mil

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Glossary term

Minimum Sensitivity

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Modulation Bandwidth

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Glossary term

Modulation Frequency

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Glossary term

Modulation Transfer Function (MTF)

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Glossary term

Moment Load

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Glossary term

Monochromatic

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Glossary term

Monochrome Sensor

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Glossary term

Mid-Spatial Frequency (MSF) Errors

Deviations in surface form relative to an ideal shape at higher spatial frequencies than Zernike polynomial aberrations but lower frequencies than roughness.

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